Picture of Dual SRD 14 (150mm) and 15 (200 mm)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Liisa Valkonen
2nd Responsible:
Process:
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Description
Details
Tool name:
Dual SRD 14 (150mm) and 15 (200 mm)
Area/room:
M1 G Lithography and BCB
Category:
Wet Processes
Manufacturer:
Goldfinger/Verteq
Model:
Superclean 1800-6
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