Picture of Rena Cu plating A
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Jaana Marles
2nd Responsible:
Process:
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Description

http://www.micronova.fi/nanofabrication_centre-002/equipment/electrochemical_deposition/rena_copper_via-electroplating_system-060303-l-cu_via---f518a/

Details
Tool name:
Rena Cu plating A
Area/room:
M2 F5 Plating
Category:
Electrochemical Deposition
Manufacturer:
RENA
Model:
.
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