Picture of Wet bench Resist Removal
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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Compulsory to mark solvent change in PESO

Approved use : Ultrasound resist removal

Allowed materials : Al, Ti, W, Cr

Forbidden materials : All other metals

NO LIFT OFF!

Tool name:
Wet bench Resist Removal
Area/room:
M2 F8 Lithography
Category:
Wet Processes
Manufacturer:
Stangl
Model:
Solvent

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