Picture of HF vapor etcher MEMS-CET
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
Paula Kettula
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Tool name:
HF vapor etcher MEMS-CET
Area/room:
M1 B Plasma Etching
Category:
Dry etching
Manufacturer:
Primaxx
Model:
MEMS-CET

Instructors

Licensed Users

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