Picture of Manual spinner SCS
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.

This manual spinner is used to coat either will wafer sizes of 6-8 inch or pieces of a wafer. Pay attention to the chuck size what suits your needs. Materials that are used EBL lithography can be used.

While the wafer is spinning, the tool lid has to be on at all time. Make sure to keep clean the bowl when coating is finished.

 

Tool name:
Manual spinner SCS
Area/room:
M1 A Lithography
Category:
Lithography
Manufacturer:
SCS
Model:
SCS

Instructors

Licensed Users

You must be logged in to view tool modes.