Picture of Mask Aligner MA200
Current status:
AVAILABLE
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Fully automatic cassette-to-cassette contact aligner  with front and back side alignment for up to 6” & 8” wafers. With UV400 Optics and with the other hardware at VTT, the nominal resolution is 2 µm. Prealigner accuracy is +/- 300 µm. Chuck is moved for alignment (mask stays put), and the range of movement is only +/- 3 mm.

Tool name:
Mask Aligner MA200
Area/room:
M1 G Lithography and BCB
Category:
Lithography
Manufacturer:
Suss MicroTec
Model:
MA 200

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