Picture of Microscope A
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
Process:
You must be logged in to view files.

A basic binocular optical microscope for a quick test of development step during the lithography process. Can be used also for checking the patterns on the photo-mask.

Key Features and Accessories:

Instrument contains a carousel with three objectives (Leitz Wetzlar) with x10, x20, and x50 magnification. A yellow light filter is attached in order to protect the photoresist layer from over-exposure during the inspection.

Key Specifications:

Resolution 2 mm – 2 μm 
Table movement in X-Y directions     ± 5 cm

Substrate Size:

Up to 200mm (smaller pieces possible)

Allowed Materials:

All solid materials allowed in a cleanroom

Forbidden Materials:

Soft sticky samples

Tool name:
Microscope A
Area/room:
M2 F8 Lithography
Category:
Characterization
Manufacturer:
Leitz
Model:
Leitz

Instructors

Licensed Users

You must be logged in to view tool modes.