Picture of Microwave asher Aura1000
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AVAILABLE
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Model Aura 1000 is a single wafer microwave downstream photoresist asher system for 150 mm wafers. It is capable of front and backside isotropic removal of the photoresist.

Performance is up to 60 wafers per hour.

Allowed materials:

150 mm wafers, no wafer pieces.

Only IC-clean materials are allowed 

150 mm wafers, no wafer pieces.

Only IC-clean materials are allowed

Tool name:
Microwave asher Aura1000
Area/room:
M1 B Plasma Etching
Category:
Other processes
Manufacturer:
GaSonics
Model:
Aura 1000

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