Picture of Parylene spray deposition tool
Current status:
WARNING
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Description:

The SCS Labcoter 2 Parylene Deposition System (PDS 2010) performs reliable and repeatable application of Parylene conformal coatings. The portable Labcoter 2 applies Parylene coatings to components such as circuit boards, sensors, wafers, medical devices, MEMS and elastomeric components for research, development .

Key Features and Accessories:

The deposition process begins as the powdered precursor (dimer) is vaporized under vacuum and heated to form a dimeric gas. The gas is then pyrolized to cleave the dimer into its monomeric form, and fnally is deposited as a transparent polymer flm. The polymerization process occurs at ambient temperatures and does not involve solvents, catalysts or cure forces. Parylene coatings can be applied in thicknesses from several hundred angstroms to 75 microns.

Key Specifications:

Only Palynene N and Parylene C are available

Substrate Size:

up to 200mm dia

Allowed Materials:

Most materials. See below for restrictions. For CMOS / IC-compatible samples, coat the chamber with a few hundred nm thick parylene before placing the sample into the chamber. It is on the responcibility of the user to make sure the process is clean enough - e.g. particles generated when previous coatings are peeled during/after the process may induce contamination, thus chamber cleaning (removal of old parylene layers) may somethimes be needed.

Forbidden Materials:

Materials that evaporate in vacuum at room temperature

Availability and Cost:

-

Name, Model and Manufacturer:

Parylene Deposition System,
PSD 2010 Labcoater2,
Specialty Coating Systems

Location:

M1, (F) BCB processing

Tool name:
Parylene spray deposition tool
Area/room:
M1 Service area
Category:
Other processes
Manufacturer:
SCS Coating
Model:
PSD 2010 Labcoater2

Instructors

Licensed Users

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