Picture of SEM/EDX/e-beam
Current status:
AVAILABLE
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Scanning Electron Microscope (SEM) for imaging. Airlock sample exchange for quicker pump times. InLens and Secondary Electron detectors available.

Additional modules: Oxford Instruments EDX and Elphy Plus e-beam writer. EDX is normally available, e-beam not unless specifically needed.

Tool name:
SEM/EDX/e-beam
Area/room:
M1 A Lithography
Category:
Characterization
Manufacturer:
Zeiss
Model:
LEO1560

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