Picture of Rinse Dryer 100
Current status:
AVAILABLE
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Centrifuge for drying wafers in a cassette.

Key Specifications:

Wafer size 100 mm
Wafer shape Round
Rotations Programmable (Not recommended)

 

Allowed Materials:

Substrates: Silicon, Glass 
Metals: Al, Ti,  W, Cr

 

 

 

Tool name:
Rinse Dryer 100
Area/room:
M2 F12 Chemistry
Category:
Wet Processes
Manufacturer:
Semitool
Model:
2 stock

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