Use of this spin rinse/dryer (SRD) is binded to RCA cleaning of silicon wafers any other use is not possible
Upper SRD for 150mm wafers
lower SRD for 100 mm wafers
N2 flow is not big enough that you could use both Verteq rinse dryers simultaneously.
Alarm for too small N2 flow is HELP 0002. Reset by pressing STOP-START.