Picture of Rinse Dryer 150
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AVAILABLE
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Centrifuge for drying wafers in a cassette.

Key Features and Accessories:

-

Key Specifications:

Wafer size 150 mm
Wafer shape Round
Rotations Programmable (Not recommended)
 

Allowed Materials:

Substrates: Silicon, Glass 
Metals: Al, Ti,  W, Cr

Tool name:
Rinse Dryer 150
Area/room:
M2 F12 Chemistry
Category:
Wet Processes
Manufacturer:
Semitool
Model:
nn

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