Picture of HMDS Desiccator
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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Approved materials : Semiconductor wafers and chips,

Glass wafers

Tool name:
HMDS Desiccator
Area/room:
M2 F8 Lithography
Category:
Lithography
Manufacturer:
nn
Model:
nn

Approved use : Treatment of samples to to improve resist adhesion

Instructors

Licensed Users

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