Picture of Glovebox ALD Precursors
Current status:
AVAILABLE
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Intended for ALD precursor refilling.

 

**Other use permitted only after approval!**

Inert gas: N2

Oxygen: ~0.1 ppm

Water: ~2 ppm

 

Two antechambers (small and large)

**Small antechamber may be used, after permission, very temporarily to store sensitive samples under vacuum**

 

Tool name:
Glovebox ALD Precursors
Area/room:
[Not defined]
Category:
CVD & ALD
Manufacturer:
Innovative Technology
Model:
PureLab HE 21

Instructors

Licensed Users

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