Substrate Size: Up to 200mm (smaller pieces possible).

Allowed Materials:

• Substrates: Virtually all hard substrate materials, including Si/SiOx, GaAs, InP, glass, plastics and baked photoresists.
• Films & structures: Virtually all evaporated metals, e.g. Al, Cr, Cu, Ti, W and Pt .

Forbidden Materials: Soft or sticky substrates & films; resists must be at least soft-baked prior to measurement.

Notes:

• Nominal stylus tip radius ~2 µm . A variety of different samples are measured on the tool, so the tip may carry contamination; take this into account if your samples are very sensitive.
• USE OF ALL TAPES IS FORBIDDEN ON THE SAMPLE STAGE! If you are measuring a small chip, fix it onto a dummy wafer using e.g. a droplet of water as a temporary bond.