Picture of Profilometer Dektak/XT
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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Substrate Size: Up to 200mm (smaller pieces possible)

Allowed Materials:

• Substrates: Silicon, GaAs, InP, glass, plastics and photoresist
• Evaporated metals: Al, Cr, Cu, Ti, W, Pt

Forbidden Materials: Soft sticky samples

Tool name:
Profilometer Dektak/XT
Area/room:
M2 F10 Plasma
Category:
Characterization
Manufacturer:
Bruker
Model:
NN

Instructors

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