Picture of Ion Implanter Eaton
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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Substrate Size: Thickness up to 1 mm.

Allowed Materials: Semiconductors .

Forbidden Materials: Sticky, powder and liquid materials.

You cannot get the license for this tool.

For implantation contact Victor Ovchinnikov.


 

Tool name:
Ion Implanter Eaton
Area/room:
M2 F10 Plasma
Category:
Ion Implantation
Manufacturer:
EATON
Model:
EATON NV-3206

Instructors

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