Picture of Wafer spinner POLOS
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
Process:
You must be logged in to view files.
Tool name:
Wafer spinner POLOS
Area/room:
M1 G Lithography and BCB
Category:
Lithography
Manufacturer:
SPS
Model:
MCD200 NPP

Instructors

Licensed Users

You must be logged in to view tool modes.