Picture of Field emission SEM
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
Process:
Vesa Vuorinen
You must be logged in to view files.

Allowed Materials:

Any sample compatible with high vacuum.
Not restricted for IC-compatible materials. Equipment not IC-compatible.

Forbidden Materials: Volatile or debris-ejecting samples not allowed.

Field emission scanning electron microscope (FESEM)

Magnification 10- 500000

The optimal resolution is 1.5nm.

LINK x-ray microanalyzer (EDS)

Tool name:
Field emission SEM
Area/room:
Lab 4142
Category:
Characterization
Manufacturer:
JEOL
Model:
JSM-6335F

Instructors

Licensed Users

You must be logged in to view tool modes.