Rinse & Drier for 100 mm and 150 mm wafers
- For wafers cleaned in 2F07 08 Wet Bench RCA 1-2
- Keep insert on the top of the Rise & Drier meanwhile processing 150 mm wafers.
- Begin with a dummy run Recipe 8 to rinse the tool after not being used. Use emtpy teflon casette during dummy run.
- For standard rinse & drying choose Recipe 1.