Picture of Reflectometer Opton
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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Key Specifications:

Film thickness range 50 nm - 5 µm
Accuracy of thickness measurements < 2.5 %
Time of measurement 0.5 s/point
Measured spectrum range 380 - 750 nm
Number of analyzed layers up to 3

Substrate Size: Up to 150 mm

Allowed Materials: Solid substrates

Forbidden Materials: Sticky, powder and liquid materials

Tool name:
Reflectometer Opton
Area/room:
M2 F11 Wafers
Category:
Characterization
Manufacturer:
OPTON
Model:
OPTON Axiospeed

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