Picture of Prime Oven HMDS
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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Allowed Materials:

Subsrates: silicon, quartz. Layers: IC-compatible metals

Forbidden Materials:

Non IC-compatible materials

Tool name:
Prime Oven HMDS
Area/room:
M2 F8 Lithography
Category:
Lithography
Manufacturer:
YES
Model:
YES-3

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