Picture of MOVPE III
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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 Allowed materials : Silicon, sapphire and silicon carbide.

Because of the high-temperature process, about 1000 degC, other materials need to be considered individually.

No metals.
 

Tool name:
MOVPE III
Area/room:
Lab 1018 MOVPE
Category:
Epitaxial Growth
Manufacturer:
NN
Model:
NN

Instructors

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