Picture of Aluminium Etch
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Aluminium etchant tank and rinsing tank

Phosphoric Acid Etching Mixture 80-16-4(65)

Etching rate of dynamically sputtered  unsintered aluminum = 13,55nm/s at 50 °C

It takes ~30min that Al etch warms up to 50 °C

Allowed materials : Al, W, Cr

Forbidden materials : All other metals

 

 

Tool name:
Aluminium Etch
Area/room:
[Not defined]
Category:
Wet Processes
Manufacturer:
PM Plast
Model:
NN

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