Picture of RCA 2
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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Key Specifications:

Process bath temperature: 80°C

Substrate Size: 100 mm / 150 mm

Allowed Materials:  silicon wafers

Forbidden Materials: Non-silicon materials. All metals. All non-cleanroom-compatible materials

Tool name:
RCA 2
Area/room:
M2 F11 Wafers
Category:
Wet Processes
Manufacturer:
PM Plast
Model:
NN

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