This equipment is able to measure film thickness, scan for particles/defects, measure linewidth and assess overlay.

Both 6 and 8 inch wafers can be processed, but for 8inch size - the stage holder has to be changed (only by responsible maintenance).

Wafer flat aligner must be used each time before loading the cassette, otherwise the end effector vacuum might fail.

After placing the cassette on the loadport, the bottom latch has to be placed vertically.

For more details, please check the user instructions on P drive.