Picture of Disco DADdy
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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Use: Dicing of wafers (silicon/ glass/ quartz/ sapphire or similar)

Allowed metals: All

Forbidden substrates: Thick solid metal plates

Tool name:
Disco DADdy
Area/room:
Lab 1019 Thin Film
Category:
Back-end Processes
Manufacturer:
Disco
Model:
DAD3220

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