Picture of Laser Micromachining System
Current status:
WARNING
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2nd Responsible:
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Intended for laser micromachining of all materials

Laser source Spectra Physics Spirit 1040-16-SHG

  • Available wavelengths 1040 nm, with SHG 520 nm and with THG 347 nm
  • Power at 1040 nm >16 W, at 520 nm >8W, 347 nm >4W
  • Pulse width <400 fs

Galvoscanner operates with 1040 nm and 520 nm

  • Max. Field size 70 mm x 70 mm, possible to use stitching
  • Min. spot size 10 µm, actual spot size on sample depends on material and laser power.

Stage for 150 mm wafers

Alignment possible

Tool name:
Laser Micromachining System
Area/room:
Lab 1020 MBE
Category:
Other processes
Manufacturer:
Azpect / Newport
Model:
na

Instructors

Licensed Users

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