Picture of Furnace MiniBrute Lower
Current status:
WARNING
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1st Responsible:
2nd Responsible:
Process:
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Key Specifications:

• Temperature range 400-1200°C
• N2, O2  annealing options

Substrate Size:

Max -100 mm dia. Smaller samples are loaded on dummy wafer.

Allowed Materials: Si, some metals, oxides.

Tool name:
Furnace MiniBrute Lower
Area/room:
Lab 1020 MBE
Category:
Furnace Processes
Manufacturer:
Thermco
Model:
MiniBrute

Instructors

Licensed Users

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