Picture of Fume Hood Cu Contamination
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
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Approved use : Contamination studies of Silicon, Cu- Spinning

Allowed materials : Highly pure Silicon wafers

Forbidden materials : Metals, glass

Tool name:
Fume Hood Cu Contamination
Area/room:
M2 F11 Wafers
Category:
Wet Processes
Manufacturer:
PMPlast
Model:
Spinner

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