Picture of Wet Bench KOH
Current status:
AVAILABLE
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Wet bench for various wet processing.

Two process tanks for KOH etching for 4 and 6 inch wafers with heating, cooling and stirring. Dedicated rinsing tanks.

One heatable tank for no dedicated purpose at the moment. Historically used for RCA1 cleaning.

Tool name:
Wet Bench KOH
Area/room:
Lab 1020 MBE
Category:
Wet Processes
Manufacturer:
Plade
Model:
NN

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