Picture of ATV furnace Mörkö
Current status:
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High temperature furnace.

Available gases: N2, O2, Ar

Max temperature: 1000 °C

Vacuum down to 10^-6 mbar

Has a 100mm waferboat, chamber fits also 150mm wafers (no boat, so only single wafer can be used at the moment)

Tool name:
ATV furnace Mörkö
Area/room:
M2 F10 Plasma
Category:
Furnace Processes
Manufacturer:
ATV
Model:
PEO-604

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