SE-2000 Spectroscopic ellipsometer

Key features:

• Wavelength range 190-2500 nm
• Automatic goniometer
• Automatic XY mapping stage
• Substrate size up to 200 mm
• Maximum sample height 10 mm
• Camera for measurement spot visualization
• Spot size:
  • Normal 3.5x14 mm at 75º incident angle
  • Microspot focusing optics 365x470 um at 75º incident angle
  • Ultramicrospot 60 um
• Photometry capability (Reflection, transmission and diffusion)

General information regarding user training.

When submitting for training, please provide with the details of your application according to the check list below:

• what are the materials of the films to be measured;
• what are the materials of substrates;
• what is the range of film thicknesses;
• what are substrate dimensions and thickness;
• is substrate a standard 4”, 6” or 8” wafer or smaller (cut) samples or chips;
• single measurements or mapping required.