Picture of Spectroscopic Ellipsometer SE-2000
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SE-2000 Spectroscopic ellipsometer

Key features:

  • Wavelength range 190-2500 nm
  • Automatic goniometer
  • Automatic XY mapping stage
  • Substrate size up to 200 mm
  • Maximum sample height 10 mm
  • Camera for measurement spot visualization
  • Spot size:
    • Normal 3.5x14 mm at 75º incident angle
    • Microspot focusing optics 365x470 um at 75º incident angle
    • Ultramicrospot 60 um
  • Photometry capability (Reflection, transmission and diffusion)
Tool name:
Spectroscopic Ellipsometer SE-2000
Area/room:
M2 F9 ALD
Category:
Characterization
Manufacturer:
Semilab
Model:
SE-2000

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