~~• 1C24 WAFER CLEANER IS COMPATIBLE WITH 150 mm AND 200 mm CLASS B WAFERS
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• PRIMARY USE:
• - Particle removal
• - Post stripping cleaning
• - Plasmapolymer removal
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• STANDARD RECIPES:
• - RCA for common cleaning, particle removal
• - POLYMERS for removing organic- and or post ash residues
• - POLYMERS plus RCA for organic- and post ash removal INCLUDING HF dip for nativeSC1-oxide removal
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• - SUPER SC2 for removal of ionic contamination ( PENDING )