Picture of Hot plate duo
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.

 

Manual hot plate

Hot plate is able to handle different size of substrades by varying the pin position (150 and 200mm).

Also proximity baking is possible. Hotplate surface is anodized aluminium.

Please ensure that the wafers don't have photoresist on the backside of the wafers in order to keep the HP surface clean.

Tool name:
Hot plate duo
Area/room:
M1 A Lithography
Category:
Lithography
Manufacturer:
Sawatec
Model:
HP-200

Instructors

Licensed Users

You must be logged in to view tool modes.