Picture of Manual spinner apogee
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
Jaana Marles
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Manual spinner for polyimide process.

Tool name:
Manual spinner apogee
Area/room:
M2 F3 Nanolithography
Category:
Back-end Processes
Manufacturer:
Apogee
Model:
Apogee

 

Wafer size 6 and 8”

Wafer centering tool

Adjustable EBR and BSR. (Cyclopentanone)

Top rinse (IPA)

Developer (Cyclopentanone)

Connection for EFD syringe dispenser

Instructors

Licensed Users

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