Picture of ASM LPCVD Nitride
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
Process:
Oili Ylivaara
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Tool name:
ASM LPCVD Nitride
Area/room:
M1 D Diffusion
Category:
CVD & ALD
Manufacturer:
ASM
Model:
DUO A400

Instructors

Licensed Users

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