Picture of Evaporator Ångström
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.


E-beam evaporator

  • Load-lock for 6 wafers/samples
  • Wafer size 200 mm and smaller
  • Crude oxidation in load lock possible with oxygen pressure up to 200 Torr (300 Torr)


Deposition chamber

  • Gridless Ion Beam Etch unit (Telemark)
  • 8 pocket e-beam evaporator 10 kV / 12 kW
  • Pocket size 25 cc and with liner 17.1 cc
  • Pocket reducer size 7 cc and with liner 3.6 cc
  • Multi Crystal rate sensor with 8 crystals

Wafer holder

  • Tilt ±180°
  • Rotation
  • At 45° perpendicular to IBE unit

Equipment is intended for deposition of materials on superconducting devices.

MAGNETIC MATERIALS NOT ALLOWED:

  • Ferromagnets (Fe, Co, Ni) 
  • Antiferromagnets (Cr)
  • Mn from the group of paramagnets
  • Many elements of the lanthanide group (Gd, Dy, Nd)

 

 

 

 

 

 

Tool name:
Evaporator Ångström
Area/room:
[Not defined]
Category:
Evaporation
Manufacturer:
Ångström Engineering
Model:
09091

Instructors

Licensed Users

You must be logged in to view tool modes.