Picture of Probe Station
Current status:
AVAILABLE
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Probe station Semiprobe (1F13 06) (“PILOT LINE” PROBER)
•    Probecard, RF-probes on automated manipulators, (also special photonics optical probing heads)
•    +25…+200C
•    6”, 8” wafers
•    isolated stage, bias option
•    not possible prevent light from room surroundings
•    wafer robot (2 cassettes-to-stage automated measurement possible, max 50 wafers)
•    automated system, multiple controlling possibilities, also from customer laptop

Tool name:
Probe Station
Area/room:
[Not defined]
Category:
Characterization
Manufacturer:
Semiprobe
Model:
SA-8VP

CHANGES: The original frame grabber is not working, so Vision part of the original software is not in use.

There is a replacement software part available on VTT PC, using a different camera and Labview machine vision tools. Automated wafer loading, alignment and multiple die alignment can be done.
In this case, the microscope camera is connected directly to VTT PC.

The microscope camera can be connected directly to the Semiprobe PC. Thorlabs imaging tool shows the image. There is no machine vision software ready on Semiprobe PC (after the frame grabber stopped working).

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