Picture of RTP Jipelec
Current status:
WARNING
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1st Responsible:
2nd Responsible:
Process:
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Use:  Annealing, oxidation, graphene growth
 
Process gases: N2, H2, O2, CH4, and Argon ambient

Temperature range: RT to 1200 ° C

Allowed materials : All materials

 

 

Tool name:
RTP Jipelec
Area/room:
M2 F12 Chemistry
Category:
Annealing
Manufacturer:
Jipelec
Model:
Jipelec

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