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Current status:
AVAILABLE
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Use:  Annealing, oxidation, graphene growth
 
Process gases: N2, H2, O2, CH4 and Argon

Temperature range: RT to 1200 ° C

Forbidden materials : Zn, Te, MoC.

Limited use materials - metals and polymers, according to process temperature.

 

 

Tool name:
RTP Jipelec
Area/room:
M2 F12 Chemistry
Category:
Annealing
Manufacturer:
Jipelec
Model:
Jipelec

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