Picture of LPCVD SiN
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
Process:
You must be logged in to view files.

3 Tubes in LPCVD Stack:

- CVD3 (8"), for polysilicon

- CVD2 (6"), for silicon nitride [OUT OF USE]

- CVD1 (6"), for annealing

Tool name:
LPCVD SiN
Area/room:
M2 F7 Furnace
Category:
CVD & ALD
Manufacturer:
Centrotherm
Model:
Centrotherm

Instructors

Licensed Users

You must be logged in to view tool modes.