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Description

3 Tubes in LPCVD Stack:

- CVD3 (8"), for polysilicon

- CVD2 (6"), for silicon nitride [OUT OF USE]

- CVD1 (6"), for annealing

Details
Tool name:
LPCVD SiN
Area/room:
M2 F7 Furnace
Category:
CVD & ALD
Manufacturer:
Centrotherm
Model:
Centrotherm
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