Picture of SEM EBL Zeiss Supra 40
Current status:
AVAILABLE
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2nd Responsible:
Process:
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Allowed Materials: clean room compatible materials

Forbidden Materials:

All non-cleanroom-compatible materials, out gassing specimens, liquids

Tool name:
SEM EBL Zeiss Supra 40
Area/room:
M2 F13 Analysis Lab
Category:
Characterization
Manufacturer:
Zeiss
Model:
Zeiss Supra 40

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