Picture of Evaporator e-gun Edwards
Current status:
AVAILABLE
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Process:
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Substrate Size: 50 mm circular wafers max, minimum sample size 1x1mm2.

Allowed Materials:

Substrates: Practically all substrates allowed. (Silicon, GaAs, InP, Glasses)

Forbidden Materials:

Zn, AuZn, Toxic materials, non-cleamroom compatible materials, A permission is required from main user for exotic material

Tool name:
Evaporator e-gun Edwards
Area/room:
Lab 1019 Thin Film
Category:
Evaporation
Manufacturer:
Edwards
Model:
Edwards E306A

Instructors

Licensed Users

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