Picture of Kelvin probe*
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DOWN
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1st Responsible:
2nd Responsible:
Process:
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Key Specifications:

• Temperature range 20-400°C
• Wide range of possible gas mixtures

Substrate Size: 200 mm dia. Max, but scan area 100x 100mm.

Allowed Materials:

Metal, oxides, organics (for good results must be conductive)

Forbidden Materials:

Elements and compounds with the high vapor pressure at the room temperature

Tool name:
Kelvin probe*
Area/room:
Lab 1019 Thin Film
Category:
Characterization
Manufacturer:
NN
Model:
NN

Instructors

Licensed Users

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