Picture of MBE
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1st Responsible:
2nd Responsible:
Process:
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Substrate Size: 76 mm dia. Max. Sample rotation. Holders for smaller samples are available.

Allowed Materials: Metal, oxides compatible with MBE

Forbidden Materials: Organic materials

Tool name:
MBE
Area/room:
Lab 1020 MBE
Category:
Epitaxial Growth
Manufacturer:
VG
Model:
VG Semicon

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