Description:
Equipment is Poly Plasma Etcher with Graphite electrode. Gases connected are Ar, N2, O2 and SF6.
Key Features and Accessories:
Maximum RF Power (Top Electrode) is 1200 W, Electrode Gap is programmable 0.5-2.6 cm, pressure range is 300-600 mTorr, maximum gas flows are 200 sccm. Casette to casette automatic operation.
Key Specifications:
Equipment is used for descumming of patterned polymers, surface treatment for wetting (before plating), TiW etching, Poly Silicon etching and metal surface activation (to improve polymer adhesion).
Substrate Size:
150 mm dia
Allowed Materials:
Substrates: Silicon, Quartz and Glass. Non transparent wafers only. Equipment is Non IC-clean.
Forbidden Materials: Au not allowed.
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Availability and Cost:
Availability and cost: N