This is the booking system for the process and measurement equipment at Micronova Nanofabrication Centre. You can view Tools and Info without logging in. New users of Micronova’s cleanrooms should apply for access by filling in the application form (or choose ‘User Access’). This requires that you work for VTT, Aalto University or an organisation which has an equipment use agreement with VTT or Aalto. 

 

Micronova Nanofabrication Centre has a 2 600 m2 cleanroom and adjoining laboratories equipped for the fabrication of silicon CMOS and detector structures, MEMS, III-V optoelectronics and thin film devices.

 

Micronova is Finland’s National Research Infrastructure for micro- and nanotechnology, jointly run by VTT Technical Research Centre of Finland and Aalto University.

For more information about Micronova’s activities, research topics and groups as well as infrastructure, go to www.micronova.fi.