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Wet bench Hot plates (2F08 18)

Current status:

AVAILABLE

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Description

There are 2 hot plates and vacuum system for HMDS on this "wet bench"

Details

Tool name:

Wet bench Hot plates

Area/room:

M2 F8 Lithography

Category:

Lithography

Manufacturer:

PMPlast

Model:

PMPlast

Tool Modes

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