Picture of Rinser Dryer C
Current status:
AVAILABLE
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Use of this spin rinse/dryer (SRD) is binded to RCA cleaning of silicon wafers any other use is not possible

Wafer size 100mm

Tool name:
Rinser Dryer C
Area/room:
M2 F7 Furnace
Category:
Wet Processes
Manufacturer:
Semitool
Model:
Semitool

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