The Defect Measurement System REFLEX TT (TABLE TOP) is a powerful tool for detecting particles, scratches, area defects, and haze on unpatterned silicon wafers for 150 mm and 200 mm diameter. It employs advanced diode laser illumination and a patented optical collecting system for measuring the back scattered light. During measurement, the optical sensor head is scanned over the rotating wafer, spirally sampling the entire surface. The REFLEX TT system is operated as a stand-alone unit for contamination and defect monitoring under cleanroom conditions.

Silicon substrates. Both IC-compatible- and non-IC-compatible chuck